Optical properties of thin films of indium arsenide

R. P. Howson

Thin films of indium arsenide have been prepared by the vacuum evaporation of the elements on to heated glass substrates. The optical constants were obtained by analysis of the interference fringes shown in quantitative transmittance measurements made in the wavelength range 0.7-5.0 μm. They were found to be functions of the substrate temperature. The range of substrate temperatures and film thicknesses that was used was determined by the requirements of the preparation method and the necessity of producing a film with a specularly reflecting surface. The absorption coefficient of between 10^{4}-10^{5} cm-1 for the semiconductor edge was found to agree with single-crystal data for films prepared above 200°C but the refractive index decreased as the substrate temperature increased, from 4 at 3.5 μm for films produced at ambient temperature to 3 for those prepared at the highest temperature of 400°C.

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Materials
Curve 1
Temperature, K: ~298 Wavelength Range, µm: 1.19-4.01 Geometry θ θ' w': 0° 0° Composition (weight percent), Specifications, and Remarks: InAs (<2.5 µm thick); glass (0.254 mm thick) substrate; vapor deposited in vacuum (10⁻¹ mm Hg) at 0.001 µm s⁻¹ on substrate maintained at 303 K; data extracted from smooth curve. [Author's designation: Sample 38]
Curve 2
Temperature, K: ~298 Wavelength Range, µm: 1.00-4.99 Geometry θ θ' w': 0° 0° Composition (weight percent), Specifications, and Remarks: Similar to above specimen and conditions except substrate heated to 383 K during deposition. [Author's designation: Sample 21]
Curve 3
Temperature, K: ~298 Wavelength Range, µm: 0.47-4.93 Geometry θ θ' w': 0° 0° Composition (weight percent), Specifications, and Remarks: Similar to above specimen and conditions except substrate heated to 478 K during deposition. [Author's designation: Sample 62]
Curve 4
Temperature, K: ~298 Wavelength Range, µm: 1.00-4.83 Geometry θ θ' w': 0° 0° Composition (weight percent), Specifications, and Remarks: Similar to above specimen and conditions except substrate heated to 583 K during deposition. [Author's designation: Sample 59]
Curve 5
Temperature, K: ~298 Wavelength Range, µm: 0.67-4.92 Geometry θ θ' w': 0° 0° Composition (weight percent), Specifications, and Remarks: Similar to above specimen and conditions except substrate heated to 678 K during deposition. [Author's designation: Sample 14]