Optical properties of cold- and hot-deposited gold films

John E. Davey, Titus Pankey

Gold films have been vacuum deposited onto quartz substrates in a temperature range from 5°to 750°C. Films which are deposited below about 50°C exhibit decreases in reflectivity of up to 25% over bulk values. Associated with this decrease are large increases in resistivity and near amorphous x-ray diffraction patterns yielding particle sizes of less than 250 Å. Films deposited above 350°C exhibit a superficial matte appearance and reflectivities which decrease to lower values with increasing deposition temperature. Associated with the onset of the matte appearance and the decrease of the reflectivity (for hot deposition) is lamellar particle growth in the plane of the films which increases, both in extent and depth, with increasing deposition temperature. Bulk values of reflectivity and electrical resistivity are observed with deposition in the temperature range between 240°and 350°C. The decrease in reflectivity for cold deposited films is explained on the basis of the Maxwell Garnett - Gans theories. © 1965 The American Institute of Physics.

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Materials
Curve 1
Temperature K: 300 Wavelength Range, μ: 0.24-6.89 Geometry θ θ': ~0°, ~0° Composition (weight percent), Specifications and Remarks: Gold film; deposited on quartz at 308K and annealed for 2 hrs in vacuum at 673K.
Curve 2
Temperature K: 300 Wavelength Range, μ: 0.25-10.33 Geometry θ θ': ~0°, ~0° Composition (weight percent), Specifications and Remarks: Gold film; vacuum deposited on quartz held at 513 K ; unannealed.
Curve 3
Temperature K: 300 Wavelength Range, μ: 0.31-17.71 Geometry θ θ': ~0°, ~0° Composition (weight percent), Specifications and Remarks: Gold film; vacuum deposited on quartz held at 308K; unannealed.
Curve 4
Temperature K: 300 Wavelength Range, μ: 0.31-20.67 Geometry θ θ': ~0°, ~0° Composition (weight percent), Specifications and Remarks: Gold film; vacuum deposited on quartz held at 623 K; unannealed.
Curve 5
Temperature K: 300 Wavelength Range, μ: 0.34-6.89 Geometry θ θ': ~0°, ~0° Composition (weight percent), Specifications and Remarks: Gold film; vacuum deposited on quartz held at 673 K; unannealed.
Curve 6
Temperature K: 300 Wavelength Range, μ: 0.45-11.27 Geometry θ θ': ~0°, ~0° Composition (weight percent), Specifications and Remarks: Gold film; vacuum deposited on quartz held at 773 K; unannealed.
Curve 7
Temperature K: 300 Wavelength Range, μ: 0.57-1.16 Geometry θ θ': ~0°, ~0° Composition (weight percent), Specifications and Remarks: Gold film; vacuum deposited on quartz held at 1023K; unannealed.
Curve 8
Temperature K: 300 Wavelength Range, μ: 0.413 Geometry θ θ': ~0°, ~0° Composition (weight percent), Specifications and Remarks: Gold film (2700 A thick); vacuum deposited on quartz held at 313 K; electrical resistivity at 300 K 4.97 x 10-6 ohm - cm; unannealed; [Authors' designation: Sample A].
Curve 9
Temperature K: 300 Wavelength Range, μ: 0.413 Geometry θ θ': ~0°, ~0° Composition (weight percent), Specifications and Remarks: Curve 19 specimen and conditions except annealed 1 hr at 7 03 K ; electrical resistivity at 300 K 3.56 x 10-6 ohm - cm.
Curve 10
Temperature K: 300 Wavelength Range, μ: 0.413 Geometry θ θ': ~0°, ~0° Composition (weight percent), Specifications and Remarks: Curve 19 specimen and conditions except annealed 2. 2 hrs at 7 03 K ; electrical resistivity at 300 K 3.00 x 1-1 ohm - cm.
Curve 11
Temperature K: 300 Wavelength Range, μ: 0.413 Geometry θ θ': ~0°~0° Composition (weight percent), Specifications and Remarks: Curve 19 specimen and conditions except annealed 5.4 hrs at 703 K; electrical resistivity at 300 K 3.00 x 10-1 ohm - cm.
Curve 12
Temperature K: 300 Wavelength Range, μ: 0.413 Geometry θ θ': ~0°, ~0° Composition (weight percent), Specifications and Remarks: Curve 19 specimen and conditions except annealed 23.7 hrs at 703 K; electrical resistivity at 300 K 2.83 x 10-1 ohm - cm.